The system is unique because the vaporization is accomplished
in a heated, recirculating chamber, instead of by "flashing" the
liquid to vapor on a hot surface. Therefore, the
system:
- Achieves 100% vaporization, mass in equals mass out
- Does not damage thermally sensitive precursors
- Does not generate particles or cause chamber pressure
variations
- Produces chemically pure vapors
- Can be configured for simultaneous vaporization and mixing of
up to three precursor steams
Contact our experts to provide a solution plan and quotation
to replace your bubblers or flash vaporizers with a modern, reliable
solution. We can help you estimate the economic benefits of
replacing these inefficient systems and we are confident the results
will be compelling.
For more information on the Brooks/MSP Vaporizer
system, click here.
Brooks? 
If you're planning to
attend SEMICON West this year, be sure to stop by the Brooks
Instrument booth (#729). We'll have our unique vaporization system
on display and you can find out why "Semiconductor