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The Brooks®/MSP Turbo-Vaporizer™ System is used for superior
direct liquid-inject vacuum film coating in processes such as
Atomic Layer Deposition (ALD) and MOCVD. Carrier gas that is
heated to the vaporization temperature of the liquid quickly
vaporizes the atomized liquid. This results in low temperature,
gentle vaporization that produces a very pure vapor.
Only the Brooks/MSP 2800 Turbo-Vaporizer System delivers these
outstanding benefits:
- Superior Coriolis-based flow measurement and control
- Perfectly repeatable film properties
- Uniform film structure throughout the deposition run
- More efficient precursor liquid use due to total and
complete vaporization
- Complete absence of decomposition products ensuring
particle-free films
- Remarkable dynamic range, handling precursor flows from a
few grams per hour to several thousand grams per hour
- The ability of a single vaporizer to handle multiple
precursors while ensuring both complete vaporization and
complete mixing
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