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The 7000 Series mass flow instruments are the newest addition to the Brooks® suite of digital thermal mass flow controllers. The advanced design and compact footprint make these devices ideal for demanding applications.
- New coplanar valve offers improved performance to deliver fast, accurate and reliable response across a wide and varying range of differential pressures
- 1-1/8" wide body offers users an efficient, space saving footprint
- Proprietary valve control algorithm enhances reponse time
- Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
- Available with traditional analog or digital I/O
- Globally approved for a variety of service areas
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