Brooks Instrument Website Home
SEARCH OUR SITE:

 












Products Links:
Product Portfolio
Coriolis Meters & Controllers
Coriolis Sensors & Transmitters
Vaporizer Systems
Compact Digital Thermal Mass Flow Meters & Controllers
Digital Thermal Mass Flow Meters & Controllers
Analog Thermal Mass Flow Meters & Controllers
NEMA 4X / IP66 Thermal Mass Flow Meters & Controllers
Pressure Controllers
Mass Flow Software Tools & Secondary Electronics
Armored Variable Area Meters
Glass Tube Variable Area Meters
Purgemeters
Specialized Flow Products
OEM Products
Technology Types
MeterMatch Search Tool
Product Registration
Related Links:
Application Notes
Document Library

The Brooks® line of digital thermal mass flow instruments offers faster response, better accuracy and improved control over traditional analog devices.

  • Industry leading repeatability ensures a stable process even under changing conditions
  • Self diagnostics and alarms eliminate downtime
  • Multiple communication protocols allow easy integration into many control systems
  • Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
  • Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
  • Available with traditional analog or digital I/O
  • Globally approved for a variety of service areas

Click on a product thumbnail below to see additional information

 Digital Thermal Mass Flow
Full Scale
Max Pressure
Max Temp
Input/
Output
Model
Type
Capacity
Accuracy
bar
psig
C
F


SLA6900 Series
UHP Metal Seal
Meter/Controller
3 sccm - 100 slpm1% Rate1001500651500-5 Vdc,
DeviceNet™


SLA6800 Series
Metal Seal
Meter/Controller
3 sccm - 100 slpm1% Rate1001500651500-5 Vdc,
DeviceNet™


SLA5800 Series
Elastomer Seal
Meter/Controller
3 sccm - 2500 slpm0.7% Rate
& 0.2% FS
3004500651500-5 Vdc, 4-20mA,
DeviceNet™,
PROFIBUS


5800S Series
Mass Flow
Meter/Controller
3 sccm - 2500 slpm0.7% Rate
& 0.2% FS
1001500651500-5 Vdc, 4-20mA,
RS-232/485,
FOUNDATION fieldbus™,
RS-485


Click here for software tools.

FOUNDATION Fieldbus Downloads.zip
(right click, choose 'save link as')

Download Brooks Profibus GSD File

Visit the ODVA & Profibus websites
Download DeviceNET EDS Files
Delta MFC EDS File
Delta MFC -RT EDS file
Delta MFM EDS File
Delta PVC EDS File


Last Updated 02/04/08

© Brooks Instrument, LLC. 2007