The Brooks® line of analog thermal mass flow instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy and simple integration.
Years of field-proven reliability
Analog I/O allows for quick and easy system integration
Elastomer seal option provides exceptional leak integrity and maximizes control valve shutoff dependability
Ultra-high purity (UHP) and metal seal options ensure clean flow paths for contamination sensitive processes
Globally approved for a variety of service areas
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Analog Thermal Mass Flow Controller, UHP
The BrooksŪ Model 5964 UHP
metal sealed mass flow controller offers state-of-the-art performance in gas flow measurement and control. It combines the outstanding leak integrity of metal seals, ultra-clean internal surface finish (5 Ra avg) for particulate-free delivery and enhanced response for rapid process applications.
Thermal Mass Flow, Semiconductor
The Brooks Instrument Semiconductor line of thermal mass flow and pressure instruments is designed to meet the rigorous demands of our customers’ established and newly developing process applications. Availability of either analog or digital based technologies ensures the right fit for the application.
Thermal Mass Flow Controller, 3 - 30,000 sccm, Metal Seals
The BrooksŪ Model 5850EM metal sealed mass flow controller accurately measures and controls gas flows in ultra-clean environments of 3 - 30,000 sccm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Thermal Mass Flow Controller, 10 - 100 slpm, Metal Seals
The BrooksŪ Model 5851EM metal sealed mass flow controller accurately measures and controls gas flows in ultra-clean environments of 10 - 100 slmp (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals
The BrooksŪ Model 5850E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
The BrooksŪ Model 5851E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals
The BrooksŪ Model 5853E elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals
The BrooksŪ Model 5860E elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer Seals
The BrooksŪ Model 5861E elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals
The BrooksŪ Model 5863E elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 3 - 30,000 sccm, Elastomer Seals
The BrooksŪ Model 5850i mass flow controller accurately measures and controls gas flows of 3 - 30,000 sccm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 10 - 100 slpm, Elastomer Seals
The BrooksŪ Model 5851i elastomer sealed analog mass flow controller accurately measures and controls gas flows of 10 - 100 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Controller, 100 - 1,000 slpm, Elastomer Seals
The BrooksŪ Model 5853i elastomer sealed analog mass flow controller accurately measures and controls gas flows of 100 - 1,000 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Meter, 3 - 30,000 sccm, Elastomer Seals
The BrooksŪ Model 5860i elastomer sealed analog mass flow meter accurately measures gas flows of 3 - 30,000 sccm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Meter, 10 - 100 slpm, Elastomer Seals
The BrooksŪ Model 5861i elastomer sealed analog mass flow meter accurately measures gas flows of 10 - 100 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
Analog Thermal Mass Flow Meter, 100 - 1,000 slpm, Elastomer Seals
The BrooksŪ Model 5863i elastomer sealed analog mass flow meter accurately measures gas flows of 100 - 1,000 slpm (Nitrogen). Brooks' extremely stable flow sensor provides reliable, repeatable and accurate flow measurement even under varying process conditions. It eliminates the need for continuous monitoring and readjustment of gas pressures to provide a stable gas flow.
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