Brooks NEMA 4X / IP65 thermal mass flow meters and mass flow controllers

NEMA 4X/IP66 Thermal Mass Flow

Full Scale

Max Pressure

Max Temp

Input/
Output

Model

Type

Capacity

Accuracy

bar

psig

SLAMf Series

Digital
Meter/Controller

3 sccm - 2500 slpm

0.7% Rate
and
0.2% FS

100

1500

150

0-5 Vdc,
4-20 mA,
FOUNDATION fieldbus™,
RS-485

Digital Thermal Mass Flow Meter/Controller, NEMA 4X/IP65
Brooks® SLMf series digital thermal mass flow meter/controller products are desgined specifically for use in harsh environments. These devices' unique NEMA 4X/1P65 enclosures provide protection from dust and water, making them ideal for indoor or outdoor use. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for a variety of service areas.

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Mf-S Series

Smart Mass Flow
Meter/Controller

3 sccm - 36000 slpm

0.7% Rate
and
0.2% FS

100

1500

150

0-5 Vdc,
4-20 mA,
RS-232/485
PROFIBUS DP®

Digital Thermal Mass Flow Meter/Controller, NEMA 4X/IP65
Brooks® Smart Mf-S series digital thermal mass flow meter/controller products are housed in an integral NEMA 4X/1P65 enclosure, and feature accuracies of 0.7% rate and 0.2% FS. The Mf-S Series provides superior reliability proven by thousands of installations and assured by the device's self-diagnostics and Brooks' proprietary Adaptive Valve Control algorithms.

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Mfi Series

Analog
Meter/Controller

3 sccm - 1000 slpm

1% FS

100

1500

150

0-5 Vdc,
4-20 mA

Analog Thermal Mass Flow Meter/Controller, NEMA 4X/IP6G
Brooks® Mfi series analog thermal mass flow meter/controller products are desgined specifically for use in harsh environments. These devices' unique NEMA 4X/1P65 enclosures provide protection from dust and water, making them ideal for indoor or outdoor use. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for a variety of service areas.

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MfX Series

Analog
Meter/Controller

3 sccm - 1000 slpm

1% FS

100

1500

150

0-5 Vdc,
4-20 mA

Analog Thermal Mass Flow Meter/Controller, Explosion-Proof
Brooks® MfX series analog thermal mass flow meter/controller products are desgined specifically for use in harsh environments. These devices' unique NEMA 4X/1P65 enclosures provide protection from dust and water, making them ideal for indoor or outdoor use. Industry leading repeatability ensures a stable process even under changing conditions. Self diagnostics and alarms eliminate downtime. These devices are globally approved for a variety of service areas.

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