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 Thermal Mass Flow (TMF) technology uses thermodynamic principles to derive actual mass flow. A thermal mass flow sensor can be combined with an integral valve and PID controller in one compact, efficient instrument that can accurately control the flow of gases and liquids over a wide range of flowrates. A pressure sensor can be mounted in place of a flow sensor for applications requiring pressure control. TMF products exhibit high repeatability and accuracy, providing an effective way to ensure a reliable and stable process. Brooks portfolio of digital and analog thermal mass flow controllers covers every technology from ultra high purity (UHP) mass flow and elastomer seal mass flow to downport MFC technology and Smart MFCs.
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Brief descriptions and links to all Brooks thermal mass flow meters, flow controllers and pressure controllers:
Compact Digital Thermal Mass Flow Meters and Mass Flow Controllers
The 7000 Series mass flow instruments are the newest addition to the Brooks suite of digital thermal mass flow meters and mass flow controllers. The advanced design and compact footprint make these devices ideal for demanding applications. Models include:
SL7900 Series - Ultra high purity (UHP) metal seal thermal mass flow meter and controller
SL7800 Series - Metal seal thermal mass flow meter and controller
Digital Thermal Mass Flow Meters and Mass Flow Controllers
The Brooks line of digital thermal mass flow meters and mass flow controllers offers faster response, better accuracy and improved control over traditional analog thermal mass flow meters and controllers. Models include:
SL5800 Series - Elastomer seal thermal mass flow meter and controller
SL6900 Series - Ultra high purity (UHP) metal seal thermal mass flow meter and controller
SL6800 Series - Metal seal thermal mass flow meter and controller
5800S Series - Smart thermal mass flow meter and controller
Analog Thermal Mass Flow Meters and Mass Flow Controllers
The Brooks line of analog thermal mass flow meters and mass flow controllers is designed to meet the rigorous demands of our customers’ established and newly developing process applications. These devices continue to add to their expansive installed base due to their fast response, excellent accuracy and simple integration. Models include:
5850EM Series - Metal seal thermal mass flow meter and controller
5964/5965 - Ultra high purity (UHP) metal seal thermal mass flow meter and controller
5800E Series - Elastomer seal thermal mass flow meter and controller
5800i Series - Elastomer seal thermal mass flow meter and controller
NEMA 4X/IP65 Thermal Mass Flow Meters and Mass Flow Controllers
The Brooks Mf™ Series of thermal mass flow meters and mass flow controllers is designed specifically for use in harsh environments. These devices' unique enclosures provide protection from dust and water making them ideal for indoor or outdoor use. Models include:
SLMF Series - Weatherproof, hazardous locations (Class 1 Div 2 / Zone 2) digital thermal mass flow meter and controller
Mf50S Series - Weatherproof, hazardous locations (Class 1 Div 2 / Zone 2) digital thermal mass flow meter and controller
Mfi Series - Weatherproof analog thermal mass flow meter and controller
MFX Series - Weatherproof, hazardous locations (Class 1 Div 2) analog thermal mass flow meter and controller
EX Series - Explosion proof (Zone 1) analog thermal mass flow meter and controller
Pressure Controllers, Analog & Digital
The Brooks line of pressure controllers utilizes Brooks' superior mass flow designs and applies them to process pressure. With a wide variety of control and configuration options, Brooks is certain to have the right pressure controller for your application. Models include:
SL7810/20 - Metal seal 1-1/8” thermal mass pressure controller
SL6910/20 - Ultra high purity (UHP) metal seal thermal mass pressure controller
SL6810/20 - Metal seal thermal mass pressure controller
SL5810/20 - Elastomer seal thermal mass pressure controller
5866E - Elastomer seal thermal mass pressure controller, high pressure
5866M - Metal seal thermal mass pressure controller, high pressure
SL7840 - Metal seal 1-1/8” remote transducer/pressure controller and flow meter
SL6940 - Ultra high purity (UHP) metal seal remote transducer/pressure controller and flow meter
SL6840 - Metal seal remote transducer/pressure controller and flow meter
SL5840 - Elastomer seal remote transducer/pressure controller and flow meter
5866RT - Elastomer seal remote transducer/pressure controller/ and flow meter |
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