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Semiconductor Industry


    
Liquid Analytical Solutions for the Semiconductor Industry
Ultrapure water (UPW) is absolutely critical to high yield manufacturing in the semiconductor industry. Wafer fabrication facilities, precision disk drive and flat panel display manufacturers plus many other segments within the industry rely on accurate liquid analysis for UPW production and monitoring throughout vast distribution systems. On-line analytical measurements in CMP slurries and in systems for water re-use, wastewater treatment and scrubber control are also required.

To satisfy the unique demands of this high-tech industry Emerson Process Management offers a wide variety of Rosemount Analytical sensors and instruments for monitoring and/or controlling conductivity/resistivity, temperature (including advanced UPW temperature compensation), pH, high-purity pH, ORP, dissolved oxygen, ozone, chlorine, turbidity, flow, and process refractometry. Count on Emerson and consider it solved.

View, Listen to or Download Application Data Sheets here:
Hydrogen Peroxide in SemiConductors & CMP Processes    PDF     Audio
Basics of pH Control    PDF     Audio
Leak Detection using Conductivity    PDF     Audio
Leak Detection with pH    PDF     Audio
Controlling Heat Exchanger Leaks    PDF     Audio

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